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Proceedings Paper

Surface patterning by an improved laser-induced forward transfer technique
Author(s): Tamas Szoerenyi; Zsolt Toth; Zoltan Kantor
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Paper Abstract

A simple and inexpensive single-step technique for surface patterning in the micrometers regime is presented. As a result of a systematic study on laser-induced ablation and transfer of tungsten thin films it is shown that deposition of well adhering micrometer sized patterns of 100% coverage preserving the shape and dimensions of the laser processed area can be attained by single pulses of peak power up to 100 mW and 100 microsecond(s) - 1 ms duration from a diode laser pumped YAG laser.

Paper Details

Date Published: 1 February 1994
PDF: 7 pages
Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167550
Show Author Affiliations
Tamas Szoerenyi, Research Group on Laser Physics (Hungary)
Zsolt Toth, Research Group on Laser Physics (Hungary)
Zoltan Kantor, Research Group on Laser Physics (Hungary)


Published in SPIE Proceedings Vol. 2045:
Laser-Assisted Fabrication of Thin Films and Microstructures

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