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Proceedings Paper

Diode laser-induced pyrolytic decomposition of spin-coated organometallic thin films
Author(s): Stephane Evoy; Marie-Helene Bernier; Patrick Desjardins; Ricardo Izquierdo; Michel Meunier; Edward Sacher
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Paper Abstract

We have developed a compact and reliable diode laser-based system for the direct writing of metals from thin organometallic films deposited onto polyimide and SiO2 substrates. This system uses an AlGaAs diode laser array, emitting at (lambda) equals 796 nm with a maximum power of 1 W. A commercially available gold ink was spin-coated onto the substrate to form the precursor film. Direct writing was achieved by focusing the laser beam onto the film and by moving the substrate at speeds ranging from 10 to 15,000 micrometers /s. We deposited gold lines 2 - 12 micrometers wide onto SiO2 and 13 - 17 micrometers wide onto polyimide; a thickness of 0.1 micrometers was evaluated by profilometry. Conductive deposits with resistivities of 30 (mu) (Omega) (DOT)cm were obtained on polyimide with good reproducibility at high writing speeds. The selective electroless plating of copper was achieved onto the gold lines deposited on SiO2. However, prior annealing was necessary to obtain reproducible plating.

Paper Details

Date Published: 1 February 1994
PDF: 8 pages
Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167543
Show Author Affiliations
Stephane Evoy, Ecole Polytechnique de Montreal (Canada)
Marie-Helene Bernier, Ecole Polytechnique de Montreal (Canada)
Patrick Desjardins, Ecole Polytechnique de Montreal (Canada)
Ricardo Izquierdo, Ecole Polytechnique de Montreal (Canada)
Michel Meunier, Ecole Polytechnique de Montreal (Canada)
Edward Sacher, Ecole Polytechnique de Montreal (Canada)


Published in SPIE Proceedings Vol. 2045:
Laser-Assisted Fabrication of Thin Films and Microstructures
Ian W. Boyd, Editor(s)

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