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Proceedings Paper

Low-fluence laser excitation processes
Author(s): Henry Helvajian; Lawrence Henry Wiedeman; H.-S. Kim
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Paper Abstract

Experimental results show that low-fluence UV laser irradiation induces non-thermal photosputtering from surfaces. The photophysical process is the result of surface electronic excitation and energy pooling at particular sites. We present data which show the preferential removal of arsenic from arsenic doped silicon and the role of plasmon excitation in the species desorption from thin metallic films. The observed phenomena has application in nanofabrication technology.

Paper Details

Date Published: 1 February 1994
PDF: 8 pages
Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167540
Show Author Affiliations
Henry Helvajian, The Aerospace Corp. (United States)
Lawrence Henry Wiedeman, The Aerospace Corp. (United States)
H.-S. Kim, The Aerospace Corp. (United States)


Published in SPIE Proceedings Vol. 2045:
Laser-Assisted Fabrication of Thin Films and Microstructures

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