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Proceedings Paper

Characterization of imaging normal-incidence multilayer mirrors for the 40- to 300-Å range by spectroscopic techniques using a laser-plasma radiation source
Author(s): Eugene N. Ragozin; Nikolai N. Kolachevsky; Mikhail M. Mitropolsky; Vladimir A. Slemzin; Nikolai N. Salashchenko
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Paper Abstract

A number of high-performance normal-incidence multilayer mirrors (MMs) have been fabricated on concave (r equals 1.6 - 2.0 m) fused silica substrates using laser deposition and a magnetron ion sputtering source. The resonance wavelengths (lambda) 0 equals 2nd of the MMs synthesized are proximate to 45, 130, 175, 190, and 304 angstroms. The MMs have been subjected to scrutiny by a spectroscopic technique employing a laser-plasma broadband XUV radiation source. The spectral shapes of the resonance reflection curves, the (lambda) 0 values, and the aperture uniformity (topography) of the mirrors have been determined spectroscopically. Normal-incidence reflection maxima, which correspond to higher-order reflection (k(lambda) equals 2n(lambda )d, k > 1), have been observed for all of the Mo-Si MMs with (lambda) >= 175 angstroms.

Paper Details

Date Published: 1 February 1994
PDF: 10 pages
Proc. SPIE 2012, Ultrashort Wavelength Lasers II, (1 February 1994); doi: 10.1117/12.167387
Show Author Affiliations
Eugene N. Ragozin, P.N. Lebedev Physical Institute (Russia)
Nikolai N. Kolachevsky, P.N. Lebedev Physical Institute (Russia)
Mikhail M. Mitropolsky, P.N. Lebedev Physical Institute (Russia)
Vladimir A. Slemzin, P.N. Lebedev Physical Institute (Russia)
Nikolai N. Salashchenko, Institute of Applied Physics (Russia)


Published in SPIE Proceedings Vol. 2012:
Ultrashort Wavelength Lasers II
Szymon Suckewer, Editor(s)

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