Share Email Print

Proceedings Paper

Synthesis and measurement of normal incidence x-ray multilayer mirrors optimized for a photon energy of 390 eV
Author(s): Anatoli I. Fedorenko; V. V. Kondratenko; Yurii P. Pershin; S. A. Yulin; E. N. Zubarev; Howard A. Padmore; K. C. Cheung; Gert E. van Dorssen; M. Roper; Igor V. Kozhevnikov; L. L. Balakireva; Alexander V. Vinogradov
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Problems of short period multilayer mirrors fabrication are discussed. Results of synthesis of multilayer structures with nanometer period are presented. The shortest period observed is 13 angstroms for W - Si and W - B4C sputtered multilayers. Measurements of near normal incidence reflectivity at (lambda) equals 31 - 32 angstroms are described for W - Sc multilayers with period about 16 angstroms. Measured reflectivity achieves 3.3% and is in good agreement with theoretical model.

Paper Details

Date Published: 1 February 1994
PDF: 11 pages
Proc. SPIE 2012, Ultrashort Wavelength Lasers II, (1 February 1994); doi: 10.1117/12.167386
Show Author Affiliations
Anatoli I. Fedorenko, Khar'kov Polytechnical Institute (Ukraine)
V. V. Kondratenko, Khar'kov Polytechnical Institute (Ukraine)
Yurii P. Pershin, Khar'kov Polytechnical Institute (Ukraine)
S. A. Yulin, Khar'kov Polytechnical Institute (Ukraine)
E. N. Zubarev, Khar'kov Polytechnical Institute (Ukraine)
Howard A. Padmore, SERC Daresbury Lab. (United States)
K. C. Cheung, SERC Daresbury Lab. (United Kingdom)
Gert E. van Dorssen, SERC Daresbury Lab. (United Kingdom)
M. Roper, SERC Daresbury Lab. (United Kingdom)
Igor V. Kozhevnikov, P.N. Lebedev Physical Institute (Russia)
L. L. Balakireva, P.N. Lebedev Physical Institute (Russia)
Alexander V. Vinogradov, P.N. Lebedev Physical Institute (Russia)

Published in SPIE Proceedings Vol. 2012:
Ultrashort Wavelength Lasers II
Szymon Suckewer, Editor(s)

© SPIE. Terms of Use
Back to Top