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Proceedings Paper

Emissivity compensated radiance-contrast-tracking pyrometry for semiconductor processing
Author(s): Michael E. Adel; Shmuel Mangan; Yaron Ish-Shalom
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Paper Abstract

In this paper an analysis technique is presented which allows the achievable performance specifications for a single wavelength pyrometer to be calculated. The effects of pyrometer wavelength, wafer emissivity, background radiation and detector noise limitations are all taken into account in the modelling. It is demonstrated that in order to maintain a given precision the wavelength of the pyrometer must be progressively reduced in order to maintain radiance contrast as the wafer temperature rises. The analysis technique is also shown to be an effective design tool for determining the required electronic and optical performance specifications of the pyrometer in order to obtain a given temperature measurement precision.

Paper Details

Date Published: 15 February 1994
PDF: 12 pages
Proc. SPIE 2091, Microelectronic Processes, Sensors, and Controls, (15 February 1994); doi: 10.1117/12.167353
Show Author Affiliations
Michael E. Adel, CI Systems Ltd. (Israel)
Shmuel Mangan, CI Systems Ltd. (Israel)
Yaron Ish-Shalom, CI Systems Ltd. (Israel)


Published in SPIE Proceedings Vol. 2091:
Microelectronic Processes, Sensors, and Controls
Kiefer Elliott; James A. Bondur; James A. Bondur; Kiefer Elliott; John R. Hauser; John R. Hauser; Dim-Lee Kwong; Asit K. Ray, Editor(s)

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