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Proceedings Paper

Manufacturing integration of real-time laser interferometry to isotropically etch silicon oxide films for contacts and vias
Author(s): Jake Pope; Robert Woodburn; J. Watkins; Roger B. Lachenbruch; Gregory Viloria
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Paper Abstract

Two methods, real-time in-situ and pre/post measurement, for control as well as issues associated with the laser interferometry method will be compared and discussed in this paper.

Paper Details

Date Published: 15 February 1994
PDF: 12 pages
Proc. SPIE 2091, Microelectronic Processes, Sensors, and Controls, (15 February 1994); doi: 10.1117/12.167339
Show Author Affiliations
Jake Pope, Motorola, Inc. (United States)
Robert Woodburn, Motorola, Inc. (United States)
J. Watkins, Motorola, Inc. (United States)
Roger B. Lachenbruch, Matrix Integrated Systems (United States)
Gregory Viloria, SC Technology, Inc. (United States)


Published in SPIE Proceedings Vol. 2091:
Microelectronic Processes, Sensors, and Controls
Kiefer Elliott; John R. Hauser; James A. Bondur; Kiefer Elliott; John R. Hauser; Dim-Lee Kwong; Asit K. Ray; James A. Bondur, Editor(s)

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