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Proceedings Paper

Fabrication and evaluation of a programmed transmission defect test mask
Author(s): Larry S. Zurbrick; Paul DePesa; Ricardo A. Diola
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Paper Abstract

Transmission defects are localized variations in the nominal transmission value of a photomask or reticle. Experience has shown that random transmission defects on reticles and photomasks have caused both device failures and reliability problems. In order to characterize the nature of transmission defects and the ability to detect them, the fabrication and evaluation of a programmed transmission defect test mask was undertaken. Using the programmed transmission test mask, quantitative data was obtained regarding the detectability of transmission errors on contact geometry.

Paper Details

Date Published: 15 February 1994
PDF: 10 pages
Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); doi: 10.1117/12.167265
Show Author Affiliations
Larry S. Zurbrick, KLA Instruments Corp. (United States)
Paul DePesa, Diamon Images, Inc. (United States)
Ricardo A. Diola, Diamon Images, Inc. (United States)


Published in SPIE Proceedings Vol. 2087:
13th Annual BACUS Symposium on Photomask Technology and Management
Edward C. Grady; Jack P. Moneta, Editor(s)

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