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Proceedings Paper

Die-to-database inspection using high accuracy database representation
Author(s): Nissim Elmaliach; Yair Eran; Shiree Shafrir; Carla Thoe; Patricia D. Beard
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Paper Abstract

The relation between the accuracy of the database representation and the inspection quality is discussed. In order to visualize the problems, a simplified model of an inspection machine is described. Using this model various aspects of database accuracy are presented. It is shown that some of the conventional methods for digitization of trapezoids, e.g. Brezenham method, may cause pixel-positioning errors and dropouts between figures. A better approach that is based on high precision subpixel addressing is proposed and its implication on reducing the database inaccuracy is proved.

Paper Details

Date Published: 15 February 1994
PDF: 9 pages
Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); doi: 10.1117/12.167263
Show Author Affiliations
Nissim Elmaliach, Orbot Instruments Ltd. (United States)
Yair Eran, Orbot Instruments Ltd. (United States)
Shiree Shafrir, Orbot Instruments Ltd. (United States)
Carla Thoe, Photronics, Inc. (United States)
Patricia D. Beard, Photronics, Inc. (United States)

Published in SPIE Proceedings Vol. 2087:
13th Annual BACUS Symposium on Photomask Technology and Management
Edward C. Grady; Jack P. Moneta, Editor(s)

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