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Proceedings Paper

Direct phase measurement in phase-shift masks with a differential heterodyne interferometer
Author(s): Hiroshi Fujita; Hiroyuki Miyashita; Hiroyuki Nakamura; Hisatake Sano; Kasuhiko Kimura; Hiroshi Nakanishi; Hideo Takizawa; Hidehiko Yamaguchi; Takahiro Ode
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Paper Abstract

Lasertec has developed a novel phase-shift measurement system 1PM11, which uses a differential heterodyne interferometer. In 1PM11, phase information is converted into a low- frequency heterodyne beat that is easily measurable by an electric current. Two-frequency laser beams which are oscillated from a He-Ne laser (632.8 nm) tube are used. When a 40X objective lens being used, the beam is 2.3 micrometers in diameter and the distance of the two beams is adjustable from 3.0 to 6.0 micrometers . The performance of 1PM11 for three types of phase-shift masks: (1) the shifter of etched quartz, (2) spin-on-glass shifter on etch- stop/quartz, and (3) the attenuating shifter, is reported.

Paper Details

Date Published: 15 February 1994
PDF: 12 pages
Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); doi: 10.1117/12.167255
Show Author Affiliations
Hiroshi Fujita, Dai Nippon Printing Co., Ltd. (Japan)
Hiroyuki Miyashita, Dai Nippon Printing Co., Ltd. (Japan)
Hiroyuki Nakamura, Dai Nippon Printing Co., Ltd. (Japan)
Hisatake Sano, Dai Nippon Printing Co., Ltd. (Japan)
Kasuhiko Kimura, Lasertec Corp. (Japan)
Hiroshi Nakanishi, Lasertec Corp. (Japan)
Hideo Takizawa, Lasertec Corp. (Japan)
Hidehiko Yamaguchi, Lasertec Corp. (Japan)
Takahiro Ode, Lasertec Corp. (Japan)

Published in SPIE Proceedings Vol. 2087:
13th Annual BACUS Symposium on Photomask Technology and Management
Edward C. Grady; Jack P. Moneta, Editor(s)

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