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Proceedings Paper

Through quartz metrology in an automated chemical process
Author(s): Alex R. Naderi
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Paper Abstract

This paper introduces the theory of operation for `through-quartz' metrology as it applies to endpoint detection in an automated chemical processor, the Siscan IMPACT 7000. Further, a statistical analysis of actual manufacturing results will be presented with a focus on improvements in manufacturing process capability over standard manufacturing techniques as well as improved reticle performance in the wafer lithographers' environment through tighter image fidelity to design rules.

Paper Details

Date Published: 15 February 1994
PDF: 8 pages
Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); doi: 10.1117/12.167253
Show Author Affiliations
Alex R. Naderi, Photronics, Inc. (United States)

Published in SPIE Proceedings Vol. 2087:
13th Annual BACUS Symposium on Photomask Technology and Management
Edward C. Grady; Jack P. Moneta, Editor(s)

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