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Proceedings Paper

Production and characterization of ion-beam-sputtered multilayers
Author(s): Joseph Pedulla; Richard D. Deslattes
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Paper Abstract

We report on the application of low pressure ion beam sputtering combined with simultaneous (neutralized) ion beam polishing to the production of multilayer structures for x-ray optics. Initial examination of these structures by high resolution diffractometry at 0.154 nm indicates that the structures exhibit a high degree of structural perfection.

Paper Details

Date Published: 1 February 1994
PDF: 11 pages
Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167240
Show Author Affiliations
Joseph Pedulla, J. Pedulla and Associates (United States)
Richard D. Deslattes, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 2011:
Multilayer and Grazing Incidence X-Ray/EUV Optics II
Richard B. Hoover, Editor(s)

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