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Proceedings Paper

Image quality, surface statistics, and all that
Author(s): Eugene L. Church; Peter Z. Takacs
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Paper Abstract

This paper describes and illustrates simple expressions for determining the effects of conventional and fractal surface errors on the performance of a simple imaging system, and conversely, of specifying surface-finish parameters in terms of system performance requirements.

Paper Details

Date Published: 1 February 1994
PDF: 12 pages
Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167229
Show Author Affiliations
Eugene L. Church, U.S. Army Research, Development and Engineering Ctr. (United States)
Peter Z. Takacs, Brookhaven National Lab. (United States)


Published in SPIE Proceedings Vol. 2011:
Multilayer and Grazing Incidence X-Ray/EUV Optics II
Richard B. Hoover, Editor(s)

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