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Proceedings Paper

Interface roughness characterization using x-ray standing waves
Author(s): Tomoaki Kawamura; Hisataka Takenaka
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Paper Abstract

An X-ray standing wave technique was used to characterize the interface roughness of multilayer structures. Standing wave fields of X-rays in multilayers are described in terms of a modified optical matrix. To include the interface roughness effect, Fresnel reflectance and transmittance coefficients in the matrix were modified. A Ni/C multilayer with about 54 angstroms periods was analyzed by X-ray diffraction and by the X-ray standing wave technique. The ratio between second and third Bragg reflection peaks suggested an expansion of nickel layer thickness. The X-ray standing wave measurement showed a reduction of nickel layer density, suggesting the diffusion of nickel atoms and formation of nickel-carbon complex. Interface roughness was estimated to be about 10 angstroms from the calculation at 85% bulk density of nickel, suggesting the diffusion of nickel.

Paper Details

Date Published: 1 February 1994
PDF: 7 pages
Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167228
Show Author Affiliations
Tomoaki Kawamura, NTT Interdisciplinary Research Labs. (Japan)
Hisataka Takenaka, NTT Interdisciplinary Research Labs. (Japan)

Published in SPIE Proceedings Vol. 2011:
Multilayer and Grazing Incidence X-Ray/EUV Optics II
Richard B. Hoover, Editor(s)

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