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Proceedings Paper

Improved reflectometry facility at the National Institute of Standards and Technology
Author(s): Charles Tarrio; Richard N. Watts; Thomas B. Lucatorto; M. Haass; T. A. Callcott; J. Jia
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Paper Abstract

We have recently completed construction of a high throughput, modest resolution soft x-ray monochromator installed at the Synchrotron Ultraviolet Radiation Facility of the National Institute of Standards and Technology. Although this monochromator will be used primarily to characterize the optical properties of multilayer-coated x-ray optics, the versatility of the instrument will enable us to measure such properties as reflectivity, transmission, diffraction, and scatter of a variety of components. We present measurements of monochromator throughput and resolution.

Paper Details

Date Published: 1 February 1994
PDF: 6 pages
Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167221
Show Author Affiliations
Charles Tarrio, National Institute of Standards and Technology (United States)
Richard N. Watts, National Institute of Standards and Technology (United States)
Thomas B. Lucatorto, National Institute of Standards and Technology (United States)
M. Haass, Univ. of Tennessee/Knoxville (United States)
T. A. Callcott, Univ. of Tennessee/Knoxville (United States)
J. Jia, Univ. of Tennessee/Knoxville (United States)


Published in SPIE Proceedings Vol. 2011:
Multilayer and Grazing Incidence X-Ray/EUV Optics II
Richard B. Hoover, Editor(s)

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