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Proceedings Paper

Performance of laminar-etched multilayer amplitude grating used with a synchrotron beam
Author(s): Philippe Troussel; S. Bac; Robert J. Barchewitz; A. Sammar; Daniel Schirmann; A. Mirone; Philippe Guerin
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Paper Abstract

We give an experimental study of soft x-ray diffraction by various laminar multilayer amplitude grating mirrors made by electron beam lithography. The +1, 0, -1 diffraction order efficiencies in the grating rule scan model and their positions were measured using synchrotron radiation on the Super-Aco at L.U.R.E in the X-UV region, particularly above the silicon L edge. These efficiencies were compared with values obtained in the detector scan mode. Their diffraction pattern were analyzed and discussed with a model. We describe a modular X-UV spectrogoniometer (0 - 20 goniometer).

Paper Details

Date Published: 1 February 1994
PDF: 12 pages
Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167217
Show Author Affiliations
Philippe Troussel, CEA/Ctr. d'Etudes de Limeil-Valenton (France)
S. Bac, CNRS and Univ. Paris XI (France)
Robert J. Barchewitz, CNRS and Univ. Paris XI (France)
A. Sammar, CNRS and Univ. Paris XI (France)
Daniel Schirmann, CEA/Ctr. d'Etudes de Limeil-Valenton (France)
A. Mirone, Ctr. for Advanced Research in Space Optics (Italy)
Univ. Paris XI (France)
Philippe Guerin, CNRS (France)


Published in SPIE Proceedings Vol. 2011:
Multilayer and Grazing Incidence X-Ray/EUV Optics II
Richard B. Hoover, Editor(s)

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