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Proceedings Paper

Nongrazing high-reflective narrowband multilayer x-ray coatings
Author(s): Muamer Zukic; Jongmin Kim; Michele M. Wilson; Jong Ho Park; Douglas G. Torr
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Paper Abstract

We report designs of multilayer narrowband reflective x-ray coatings that operate at non- grazing angles of incidence. The coatings are designed for the x-ray region from 0.1 nm - 7 nm with angles of incidence (measured relative to the film surface normal) (theta) 0, ranging from 45 degree(s) - 85 degree(s). At 85 degree(s) angle of incidence the peak reflectance is more than 65% at 0.44 nm with bandwidth less than 0.006 nm. The grazing angle of incidence provides reflectance of more than 90% but without any spectral discrimination. This design provides very high spectral purity with reflectances as high as 65% for angles of incidence between 80 degree(s) and 85 degree(s).

Paper Details

Date Published: 1 February 1994
PDF: 12 pages
Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167207
Show Author Affiliations
Muamer Zukic, Univ. of Alabama in Huntsville (United States)
Jongmin Kim, Univ. of Alabama in Huntsville (United States)
Michele M. Wilson, Univ. of Alabama in Huntsville (United States)
Jong Ho Park, Univ. of Alabama in Huntsville (United States)
Douglas G. Torr, Univ. of Alabama in Huntsville (United States)


Published in SPIE Proceedings Vol. 2011:
Multilayer and Grazing Incidence X-Ray/EUV Optics II
Richard B. Hoover, Editor(s)

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