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Proceedings Paper

Studies toward the optimization of ion polishing for multilayer x-ray mirrors
Author(s): Eberhard Adolf Spiller; Ki-Byoung Youn
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Paper Abstract

Multilayer mirrors of Co, Ni or Ru with spacer layer of C or B4C are fabricated by electron-beam deposition with ion polishing of all metal layers. Improved performance over previous work is obtained for the mirrors containing Co and Ru. Very smooth boundaries are obtained for Ni films, however, this smoothness is only obtained for coatings with a small number of layers.

Paper Details

Date Published: 1 February 1994
PDF: 11 pages
Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167205
Show Author Affiliations
Eberhard Adolf Spiller, IBM Thomas J. Watson Research Ctr. (United States)
Ki-Byoung Youn, IBM Thomas J. Watson Research Ctr. (United States)


Published in SPIE Proceedings Vol. 2011:
Multilayer and Grazing Incidence X-Ray/EUV Optics II
Richard B. Hoover, Editor(s)

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