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Proceedings Paper

Focusing of x-rays using micromachined silicon lobster eye lenses
Author(s): Andrew W. Chen; Philip E. Kaaret; Thomas W. Kenny
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Paper Abstract

We are developing a novel x-ray lens based on a 1D analogue of the optical system of the lobster's eye. The lobster eye lens consists of a large number of flat reflecting surfaces with 100 micrometers separation between adjacent surfaces. We have used silicon micromachining to fabricate arrays of 100 micrometers sized optical elements in <110> oriented single crystal silicon wafers. We used a concentrated KOH solution to anisotropically etch single crystal silicon wafers; the resulting surfaces were aligned with the <111> planes perpendicular to the face of the wafer. The pores were 50 micrometers wide and 800 micrometers deep, for an aspect ratio of 16:1. We report on the fabrication techniques and measurements of the surface microroughness of the etched surfaces.

Paper Details

Date Published: 1 February 1994
PDF: 5 pages
Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167199
Show Author Affiliations
Andrew W. Chen, Columbia Univ. (United States)
Philip E. Kaaret, Columbia Univ. (United States)
Thomas W. Kenny, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 2011:
Multilayer and Grazing Incidence X-Ray/EUV Optics II
Richard B. Hoover, Editor(s)

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