Share Email Print
cover

Proceedings Paper

Radical and molecular product concentration measurements in CF4 and CH4 RF plasmas by infrared tunable diode laser absorption
Author(s): Joda C. Wormhoudt
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published: 1 January 1990
PDF: 0 pages
Proc. SPIE 1185, Dry Processing for Submicrometer Lithography, (1 January 1990); doi: 10.1117/12.16709
Show Author Affiliations
Joda C. Wormhoudt, Aerodyne Research, Inc. (United States)


Published in SPIE Proceedings Vol. 1185:
Dry Processing for Submicrometer Lithography
James A. Bondur; Alan R. Reinberg, Editor(s)

© SPIE. Terms of Use
Back to Top