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Proceedings Paper

Fiber optic low-coherence Michelson interferometer for silicon growth measurement
Author(s): Robert R. Michael; Christopher M. Lawson
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Paper Abstract

We report on the use of optical low coherence reflectometry for silicon characterization. The measurement system uses a low coherence light source (edge-emitting LED) in conjunction with a fiber optic Michelson interferometer. This non-contact fiber optic measurement system has been used to measure silicon thickness and flatness to an accuracy of +/- 1.5 micrometers in the laboratory.

Paper Details

Date Published: 7 February 1994
PDF: 10 pages
Proc. SPIE 2072, Fiber Optic Physical Sensors in Manufacturing and Transportation, (7 February 1994); doi: 10.1117/12.166852
Show Author Affiliations
Robert R. Michael, BDM Federal Inc. (United States)
Christopher M. Lawson, Univ. of Alabama in Birmingham (United States)

Published in SPIE Proceedings Vol. 2072:
Fiber Optic Physical Sensors in Manufacturing and Transportation
John W. Berthold; Richard O. Claus; Michael A. Marcus; Robert S. Rogowski, Editor(s)

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