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Proceedings Paper

Direct kinetic measurement of photochemical reaction of diazide-type photoresist by use of rapid-scan FTIR
Author(s): K. Shoda; G. Katagiri; Hideyuki Ishida; Isao Noda
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Paper Abstract

Kinetic behavior of a fast photochemical reaction of quinone diazide-type photoresist has been followed directly by a rapid-scan FT-IR. An intermediate species, ketene, rapid depletion of diazide and formation of carboxylic acid have been captured unambiguously. It has been demonstrated that a newly developed 2-D correlation formalism is very useful in the study of the reaction mechanism and kinetics of the photoresist including matrix polymer.

Paper Details

Date Published: 31 January 1994
PDF: 2 pages
Proc. SPIE 2089, 9th International Conference on Fourier Transform Spectroscopy, (31 January 1994); doi: 10.1117/12.166799
Show Author Affiliations
K. Shoda, Toray Research Ctr., Inc. (Japan)
G. Katagiri, Toray Research Ctr., Inc. (Japan)
Hideyuki Ishida, Toray Research Ctr., Inc. (Japan)
Isao Noda, Procter & Gamble Co. (United States)

Published in SPIE Proceedings Vol. 2089:
9th International Conference on Fourier Transform Spectroscopy
John E. Bertie; Hal Wieser, Editor(s)

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