Proceedings Paper
Direct kinetic measurement of photochemical reaction of diazide-type photoresist by use of rapid-scan FTIR| Format | Member Price | Non-Member Price |
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Paper Abstract
Kinetic behavior of a fast photochemical reaction of quinone diazide-type photoresist has been followed directly by a rapid-scan FT-IR. An intermediate species, ketene, rapid depletion of diazide and formation of carboxylic acid have been captured unambiguously. It has been demonstrated that a newly developed 2-D correlation formalism is very useful in the study of the reaction mechanism and kinetics of the photoresist including matrix polymer.
Paper Details
Date Published: 31 January 1994
PDF: 2 pages
Proc. SPIE 2089, 9th International Conference on Fourier Transform Spectroscopy, (31 January 1994); doi: 10.1117/12.166799
Published in SPIE Proceedings Vol. 2089:
9th International Conference on Fourier Transform Spectroscopy
John E. Bertie; Hal Wieser, Editor(s)
PDF: 2 pages
Proc. SPIE 2089, 9th International Conference on Fourier Transform Spectroscopy, (31 January 1994); doi: 10.1117/12.166799
Show Author Affiliations
K. Shoda, Toray Research Ctr., Inc. (Japan)
G. Katagiri, Toray Research Ctr., Inc. (Japan)
G. Katagiri, Toray Research Ctr., Inc. (Japan)
Hideyuki Ishida, Toray Research Ctr., Inc. (Japan)
Isao Noda, Procter & Gamble Co. (United States)
Isao Noda, Procter & Gamble Co. (United States)
Published in SPIE Proceedings Vol. 2089:
9th International Conference on Fourier Transform Spectroscopy
John E. Bertie; Hal Wieser, Editor(s)
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