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Proceedings Paper

FTIR spectroscopic analysis of spin-on dopant layers used in proximity rapid thermal diffusion
Author(s): Fernando Romero-Borja; Piotr B. Grabiec; Wanda Zagozdzon-Wasik; Lowell L. Wood
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Paper Abstract

A new rapid thermal diffusion (proximity RTD) method, utilizing spin-on dopant (SOD) layers, was reported recently. This technique is based on an evaporation-gas phase diffusion- adsorption-surface reaction-diffusion in Si scheme. In this paper we use FTIR spectroscopy to investigate a relationship between the SOD layer structure/composition and its doping efficiency, as determined by sheet resistance (RS) measurements, for a phosphorus diffusion case.

Paper Details

Date Published: 31 January 1994
PDF: 2 pages
Proc. SPIE 2089, 9th International Conference on Fourier Transform Spectroscopy, (31 January 1994); doi: 10.1117/12.166690
Show Author Affiliations
Fernando Romero-Borja, Univ. of Houston (United States)
Piotr B. Grabiec, Univ. of Houston (United States)
Wanda Zagozdzon-Wasik, Univ. of Houston (United States)
Lowell L. Wood, Univ. of Houston (United States)

Published in SPIE Proceedings Vol. 2089:
9th International Conference on Fourier Transform Spectroscopy
John E. Bertie; Hal Wieser, Editor(s)

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