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Proceedings Paper

Spatial scanning microspectrophotometer
Author(s): Alexander N. Magunov; A. Y. Gasilov
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Paper Abstract

The automated optical system for the control of spatial distribution of the optical parameters of solids is developed. The possibilities of spectrophotometric method for detection of the low- contrast geometrical and physical inhomogeneities of dielectric, semiconducting and metal materials are investigated.

Paper Details

Date Published: 31 December 1993
PDF: 13 pages
Proc. SPIE 2161, CIS Selected Papers: Photometry, (31 December 1993); doi: 10.1117/12.166355
Show Author Affiliations
Alexander N. Magunov, Institute of Microelectronics (Russia)
A. Y. Gasilov, Institute of Microelectronics (Russia)


Published in SPIE Proceedings Vol. 2161:
CIS Selected Papers: Photometry
Leonid S. Ushakov, Editor(s)

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