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Remote monitoring of a chemical vapor infiltration process by means of the FTIR system K300
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Paper Abstract

The FT-IR system K300, primarily used for environmental monitoring by means of remote sensing techniques, has been modified in such a manner that it could be used for remote monitoring of a SiC chemical vapor infiltration process (CVI). This comprised hardware adaptations to a CVI reaction plant at DASA (MBB), as well as development of analytical methods. First measurements showed the good performance of the K300 system at the reactor. A lot of gaseous species could be detected and qualitatively analyzed (concentration changes).

Paper Details

Date Published: 31 December 1993
PDF: 9 pages
Proc. SPIE 2069, Optical Methods for Chemical Process Control, (31 December 1993); doi: 10.1117/12.166285
Show Author Affiliations
Herbert W. Mosebach, Erwin Kayser-Threde GmbH (Germany)
Markus Erhard, Erwin Kayser-Threde GmbH (Germany)
M. Resch, Erwin Kayser-Threde GmbH (Germany)
Hermann Bittner, Erwin Kayser-Threde GmbH (Germany)

Published in SPIE Proceedings Vol. 2069:
Optical Methods for Chemical Process Control
Stuart Farquharson; Jeremy M. Lerner, Editor(s)

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