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Proceedings Paper

Microwave properties of monolithic Y-Ba-Cu-O transmission line devices fabricated by the laser-writing patterning technique
Author(s): W. N. Maung; Donald P. Butler; W. Xiong; Witold Kula; Roman Sobolewski
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Paper Abstract

We report on the microwave characteristics of coplanar strip transmission line devices fabricated in epitaxial YBaCuO thin films deposited on LaAlO3 substrates using the novel laser-writing patterning technique. This technique uses laser heating to selectively anneal regions of an oxygen depleted YBaCuO thin film to form local superconducting phases. In this manner, superconductive coplanar strip transmission line structures surrounded by the semiconducting YBaCuO phase were patterned with no photomasks, surface contamination or edge degradation.

Paper Details

Date Published: 4 January 1994
PDF: 7 pages
Proc. SPIE 2156, High Tc Microwave Superconductors and Applications, (4 January 1994); doi: 10.1117/12.166154
Show Author Affiliations
W. N. Maung, Southern Methodist Univ. (United States)
Donald P. Butler, Southern Methodist Univ. (United States)
W. Xiong, Univ. of Rochester (United States)
Witold Kula, Univ. of Rochester (USA) and Institute of Physics (Poland)
Roman Sobolewski, Univ. of Rochester (USA) and Institute of Physics (Poland)

Published in SPIE Proceedings Vol. 2156:
High Tc Microwave Superconductors and Applications
Robert B. Hammond; Richard S. Withers, Editor(s)

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