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Proceedings Paper

Microfabricated optical chopper
Author(s): Michael T. Ching; Reid A. Brennen; Richard M. White
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Paper Abstract

A micromachined chopper has demonstrated modulation of coherent and incoherent light. The chopper uses an electro-statically driven lateral micromotor to actuate a shutter plate across a through-substrate window. Test devices have been fabricated and exhibit operating frequencies ranging from 1 to 31 kHz and have stable defection amplitudes of 400 micrometers . Further optimizations of the design are discussed.

Paper Details

Date Published: 15 December 1993
PDF: 7 pages
Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165705
Show Author Affiliations
Michael T. Ching, Univ. of California/Berkeley (United States)
Reid A. Brennen, Univ. of California/Berkeley (United States)
Richard M. White, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 1992:
Miniature and Micro-Optics and Micromechanics
Neal C. Gallagher; Chandrasekhar Roychoudhuri, Editor(s)

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