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Proceedings Paper

High-performance microphotonic devices with microactuator
Author(s): Hiroshi Goto
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Paper Abstract

Miniature active optical components with micro actuator are developed to miniaturize active optical components and sensors. The piezoelectric micro actuator and the miniature 2-D optical scanner, these are the key devices of the components, and its applications are described in detail.

Paper Details

Date Published: 15 December 1993
PDF: 8 pages
Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165704
Show Author Affiliations
Hiroshi Goto, Omron Corp. (Japan)


Published in SPIE Proceedings Vol. 1992:
Miniature and Micro-Optics and Micromechanics
Neal C. Gallagher Jr.; Chandrasekhar Roychoudhuri, Editor(s)

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