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Proceedings Paper

High-precision molding of integrated optical structures
Author(s): Luca G. Baraldi; Rino E. Kunz; Joachim Meissner
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Paper Abstract

Various techniques for potential low-cost fabrication of integrated optical devices by hot embossing into polymers are presented. Their advantages and disadvantages concerning fabrication restrictions and thermal properties of final devices are discussed. For two polymers, the long-term dimensional stability of embossed microstructures is investigated. The results show the suitability of this promising low-cost replication technique for practical applications.

Paper Details

Date Published: 15 December 1993
PDF: 9 pages
Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165703
Show Author Affiliations
Luca G. Baraldi, Paul Scherrer Institute (Switzerland)
Rino E. Kunz, Paul Scherrer Institute (Switzerland)
Joachim Meissner, Swiss Federal Institute of Technology (Switzerland)


Published in SPIE Proceedings Vol. 1992:
Miniature and Micro-Optics and Micromechanics
Neal C. Gallagher; Chandrasekhar Roychoudhuri, Editor(s)

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