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Proceedings Paper

Preshaping photoresist for refractive microlens array fabrication
Author(s): Theresa Rubico Jay; Margaret B. Stern
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Paper Abstract

Refractive microlenses are fabricated by the P2ROM (Preshaped Photoresist Refractive Optics by Melting) process. A polar coordinate HeCd laser beam lithography system (laser writer) is used to directly expose a continuous spheroidal profile into photoresist to fabricate 200 micrometers diameter microlenses with speeds between F/1.5 and F/5. Interferometric surface measurements, used to determine optical quality of the preshaped microlenses, indicate reduced spherical aberration in slow lenses fabricated by this method.

Paper Details

Date Published: 15 December 1993
PDF: 8 pages
Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165698
Show Author Affiliations
Theresa Rubico Jay, Lincoln Lab./MIT (United States)
Margaret B. Stern, Lincoln Lab./MIT (United States)

Published in SPIE Proceedings Vol. 1992:
Miniature and Micro-Optics and Micromechanics
Neal C. Gallagher; Chandrasekhar Roychoudhuri, Editor(s)

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