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Proceedings Paper

Testing and measurement of microlenses
Author(s): Keith O. Mersereau; Randall J. Crisci; Casimir R. Nijander; Wesley P. Townsend; Daniel J. Daly; Michael C. Hutley
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Paper Abstract

Microlenses and microlens arrays present challenging measurement problems to manufacturer and user alike. Standard techniques designed for testing larger optical components are impractical for lenses with dimensions of only a few hundred micrometers. We present several methods for characterizing the wavefront, focal length, surface profile, and other parameters of microlenses and microlens arrays. The use of Mach-Zehnder and Twyman-Green interferometers for wavefront and focal length measurement are discussed in some detail.

Paper Details

Date Published: 15 December 1993
PDF: 6 pages
Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165690
Show Author Affiliations
Keith O. Mersereau, AT&T Bell Labs. (United States)
Randall J. Crisci, AT&T Bell Labs. (United States)
Casimir R. Nijander, AT&T Bell Labs. (United States)
Wesley P. Townsend, AT&T Bell Labs. (United States)
Daniel J. Daly, National Physical Lab. (United Kingdom)
Michael C. Hutley, National Physical Lab. (United Kingdom)

Published in SPIE Proceedings Vol. 1992:
Miniature and Micro-Optics and Micromechanics
Neal C. Gallagher; Chandrasekhar Roychoudhuri, Editor(s)

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