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Proceedings Paper

Antireflection-coated arrays of binary lenses for interconnection networks at 1.5 μm
Author(s): Margit Ferstl; Berndt Kuhlow; Edgar Pawlowski
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Paper Abstract

Arrays of two different sizes, each consisting of 16 by 16 blazed Fresnel zone lenses, were fabricated in quartz glass by means of microstructuring techniques. The lenses were designed for free space optical interconnection networks operating in the IR. In order to achieve high diffraction efficiencies the kinoform profile of the microlenses was approximated by a staircase-like profile. The fabrication of the lenses involved multiple steps of repeated pattern transfer by photolithography and successive reactive ion etching. We fabricated Fresnel zone lenses with 16 levels per zone and with different focal lengths. The individual elements of the two arrays have circular and square apertures with a diameter of 2 mm and 200 micrometers respectively and were designed to operate at a wavelength of 1.52 micrometers .

Paper Details

Date Published: 15 December 1993
PDF: 12 pages
Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165678
Show Author Affiliations
Margit Ferstl, Heinrich-Hertz-Institut fuer Nachrichtentechnik Berlin GmbH (Germany)
Berndt Kuhlow, Heinrich-Hertz-Institut fuer Nachrichtentechnik Berlin GmbH (Germany)
Edgar Pawlowski, Heinrich-Hertz-Institut fuer Nachrichtentechnik Berlin GmbH (Germany)


Published in SPIE Proceedings Vol. 1992:
Miniature and Micro-Optics and Micromechanics
Neal C. Gallagher; Chandrasekhar Roychoudhuri, Editor(s)

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