Share Email Print

Proceedings Paper

Optical metrology used to sense and control a segmented optical system
Author(s): Michael J. Fehniger
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Optical metrology was developed to sense the wavefront of a mosaic optical system to correctly position and bend an active optical element. The optical system being examined is a telescope, with a segmented primary mirror, tested in auto-collimation. Located in the focal plane are two interferometers, a simultaneous phase shifting interferometer which measures the system wavefront and a lateral shearing interferometer which measures piston. The resultant wavefront and piston data are passed to a master computer which computes the forces and vectors necessary to position and bend the active element. This paper describes these interferometers, their evolution, requirements, calibration, and data evaluation techniques employed. Results from actual system testing are presented.

Paper Details

Date Published: 10 December 1993
PDF: 12 pages
Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); doi: 10.1117/12.165489
Show Author Affiliations
Michael J. Fehniger, Eastman Kodak Co. (United States)

Published in SPIE Proceedings Vol. 2003:
Interferometry VI: Techniques and Analysis
Osuk Y. Kwon; Gordon M. Brown; Malgorzata Kujawinska, Editor(s)

© SPIE. Terms of Use
Back to Top