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Proceedings Paper

Statistical theory for quasi-heterodyne ESPI with reference beam
Author(s): Wen Zheng
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Paper Abstract

This paper presents a general and meaningful description to the mechanism of quasi- heterodyne ESPI with smooth or speckled reference beam using statistical optical theory. The statistical distribution of metrological fields is derived. The limitations of transverse component of the object displacement to the fringe contrast and valid signal value of phase detection are discussed.

Paper Details

Date Published: 10 December 1993
PDF: 8 pages
Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); doi: 10.1117/12.165483
Show Author Affiliations
Wen Zheng, Guangzhou Univ. (China)


Published in SPIE Proceedings Vol. 2003:
Interferometry VI: Techniques and Analysis
Osuk Y. Kwon; Gordon M. Brown; Malgorzata Kujawinska, Editor(s)

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