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Proceedings Paper

Microtopographic inspection of surfaces: a comparison between moire, contrived lighting, and discreet triangulation methods
Author(s): Manuel Filipe M. Costa; Jose B. Almeida
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Paper Abstract

In this communication the issue of the micro-inspection of the relief structure of surfaces in the industrial world is discussed. Microtopographic inspection of surfaces, especially rough ones, by non-contact optical means is gaining more and more interest. New approaches to well-established methods like triangulation, both area and discreet, are being tried to meet the new requirements. We present a comparative study of three triangulation based dimensional inspection methods: moire that combines interferometry and triangulation, contrived lightning, and discreet active triangulation that in recent years regained interest by its versatility. New approaches are presented with emphasis to a new active, discreet, triangulation based system recently developed.

Paper Details

Date Published: 10 December 1993
PDF: 7 pages
Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); doi: 10.1117/12.165479
Show Author Affiliations
Manuel Filipe M. Costa, Univ. do Minho (Portugal)
Jose B. Almeida, Univ. do Minho (Portugal)

Published in SPIE Proceedings Vol. 2003:
Interferometry VI: Techniques and Analysis
Osuk Y. Kwon; Gordon M. Brown; Malgorzata Kujawinska, Editor(s)

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