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Proceedings Paper

Large-aperture high-accuracy phase-shifting digital flat interferometer
Author(s): Jinbang Chen; Dezhen Song; Rihong Zhu; D. Chen; Qingyun Wang; L. Chen; Yiguang Zhang
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Paper Abstract

This paper describes a large-aperture high-accuracy phase-shifting digital flat interferometer which is a combination of optic, mechanics, electricity, and algorithm. The aperture size is 250 mm and liquid surface is used as an absolute flat to eliminate systemic error. The accuracy is better than (lambda) /50 ((lambda) is Hz-Ne laser wavelength) (peak-to-valley value). The tested aperture can be enlarged to 500 mm. This interferometer will be used as our country optical flat standard instrument. This paper describes the optical interferometer, phase shifter, and calibration of precision.

Paper Details

Date Published: 10 December 1993
PDF: 9 pages
Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); doi: 10.1117/12.165473
Show Author Affiliations
Jinbang Chen, Nanjing Univ. of Science & Technology (China)
Dezhen Song, Nanjing Univ. of Science & Technology (China)
Rihong Zhu, Nanjing Univ. of Science & Technology (China)
D. Chen, Nanjing Univ. of Science & Technology (China)
Qingyun Wang, Nanjing Univ. of Science & Technology (China)
L. Chen, Nanjing Univ. of Science & Technology (China)
Yiguang Zhang, Nanjing Univ. of Science & Technology (China)


Published in SPIE Proceedings Vol. 2003:
Interferometry VI: Techniques and Analysis
Osuk Y. Kwon; Gordon M. Brown; Malgorzata Kujawinska, Editor(s)

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