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Proceedings Paper

New algorithm on phase-shifting interferometry: the overlapping averaging 4-frame algorithm
Author(s): Rihong Zhu; Jinbang Chen; Qingyun Wang; Lei Chen; Yiguang Zhang
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Paper Abstract

Phase shifting interferometry (PSI) is a highly efficient and accurate phase measuring method. The accuracy of PSI is most seriously impaired by calibration error and nonlinearity in the phase shifter. This paper presents a new algorithm, the overlapping averaging 4-frame (OAF) algorithm, which can reduce the phase error due to phase shifter errors. The relationship between the accuracy of OAF algorithm and phase shifter errors is given. From this relationship, it is verified that the OAF algorithm can reduce the phase error due to phase shifter errors. The computer simulation providing the magnitude of a calibration error and nonlinearity in the phase shifter are shown for a number of different phase-measurement algorithms. From the analysis, the result is obtained that the OAF algorithm is more highly accurate than other phase-measurement algorithms.

Paper Details

Date Published: 10 December 1993
PDF: 12 pages
Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); doi: 10.1117/12.165470
Show Author Affiliations
Rihong Zhu, Nanjing Univ. of Science & Technology (China)
Jinbang Chen, Nanjing Univ. of Science & Technology (China)
Qingyun Wang, Nanjing Univ. of Science & Technology (China)
Lei Chen, Nanjing Univ. of Science & Technology (China)
Yiguang Zhang, California State Univ. (China)


Published in SPIE Proceedings Vol. 2003:
Interferometry VI: Techniques and Analysis
Osuk Y. Kwon; Gordon M. Brown; Malgorzata Kujawinska, Editor(s)

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