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Proceedings Paper

Sinusoidal phase-modulating Fizeau interferometer using phase-conjugate wave
Author(s): Osami Sasaki; Xiangzhao Wang; Yuuichi Takebayashi; Takamasa Suzuki
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Paper Abstract

We propose a sinusoidal phase-modulating Fizeau interferometer using self-pumped conjugate wave for surface profile measurements. The interferometer is self-referencing and free from the effects of the axial movements of object surfaces. The characteristics of the interferometer are made clear through the surface measurement of a diamond-turned aluminum disk. For large-size objects, the size of the plate glass can be much smaller than that of the object. The small-size plate glass provides the accurate sinusoidal phase modulation easily. We also propose the method of absolute measurement to eliminate the undesirable phase distribution caused by aberration of the lenses. It is shown through the surface profile measurements of a mirror that the interferometer and the method of absolute measurement are useful for large- size objects.

Paper Details

Date Published: 10 December 1993
PDF: 9 pages
Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); doi: 10.1117/12.165461
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Xiangzhao Wang, Niigata Univ. (Japan)
Yuuichi Takebayashi, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)

Published in SPIE Proceedings Vol. 2003:
Interferometry VI: Techniques and Analysis
Osuk Y. Kwon; Gordon M. Brown; Malgorzata Kujawinska, Editor(s)

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