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Proceedings Paper

Effects of detector characteristics on the phase measurement in quasi-heterodyne reference-beam ESPI
Author(s): Wen Zheng
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Paper Abstract

This paper describes the statistical distribution of metrological fields and the phase measurement method in quasi-heterodyne reference-beam ESPI under limited detector resolution. The effects of resolution, electronic noise, intensity saturation, and the quantization error on the phase measurement are discussed. The limitation of non-linearity of the detector to the phase extraction is also investigated.

Paper Details

Date Published: 10 December 1993
PDF: 8 pages
Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); doi: 10.1117/12.165452
Show Author Affiliations
Wen Zheng, Guangzhou Univ. (China)

Published in SPIE Proceedings Vol. 2003:
Interferometry VI: Techniques and Analysis
Osuk Y. Kwon; Gordon M. Brown; Malgorzata Kujawinska, Editor(s)

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