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Proceedings Paper

Building world-class microlithographic lens systems: optical material requirements and qualification methods
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Paper Abstract

Building successive generations of state-of-the-art wide field, sub-micron microlithographic lens systems dictates ever-tightening material tolerances that challenge glass manufacturers. This paper discusses the optical material needs for microlithographic lens systems and Tropel's in-house material qualification program. Material qualification is divided into three successive stages: (1) fluorescence testing to qualitatively analyze color center characteristics of the material; (2) homogeneity testing to determine the relative volumetric variations in index; and (3) absolute index testing at multiple wavelengths to determine the material's dispersion characteristics.

Paper Details

Date Published: 6 December 1993
PDF: 12 pages
Proc. SPIE 2018, Passive Materials for Optical Elements II, (6 December 1993); doi: 10.1117/12.165236
Show Author Affiliations
Paul R. DeStefano, GCA/Tropel (United States)
Paul F. Michaloski, GCA/Tropel (United States)


Published in SPIE Proceedings Vol. 2018:
Passive Materials for Optical Elements II
Gary W. Wilkerson, Editor(s)

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