Share Email Print

Proceedings Paper

Building world-class microlithographic lens systems: optical material requirements and qualification methods
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Building successive generations of state-of-the-art wide field, sub-micron microlithographic lens systems dictates ever-tightening material tolerances that challenge glass manufacturers. This paper discusses the optical material needs for microlithographic lens systems and Tropel's in-house material qualification program. Material qualification is divided into three successive stages: (1) fluorescence testing to qualitatively analyze color center characteristics of the material; (2) homogeneity testing to determine the relative volumetric variations in index; and (3) absolute index testing at multiple wavelengths to determine the material's dispersion characteristics.

Paper Details

Date Published: 6 December 1993
PDF: 12 pages
Proc. SPIE 2018, Passive Materials for Optical Elements II, (6 December 1993); doi: 10.1117/12.165236
Show Author Affiliations
Paul R. DeStefano, GCA/Tropel (United States)
Paul F. Michaloski, GCA/Tropel (United States)

Published in SPIE Proceedings Vol. 2018:
Passive Materials for Optical Elements II
Gary W. Wilkerson, Editor(s)

© SPIE. Terms of Use
Back to Top