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Proceedings Paper

Acousto-optic scanning system for a large-size mask plotter
Author(s): Eiichi Tamaki
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Paper Abstract

A two-beam laser scanning system using an acousto-optic deflector (AOD) has been developed. The lensing effect and the AOD nonlinearity were investigated, and were completely compensated for. In order to write a variety of masks, a servomotor-based auto- focus and an auto-revolver with up to three objective lenses were adopted.

Paper Details

Date Published: 29 December 1993
PDF: 8 pages
Proc. SPIE 1987, Recording Systems: High-Resolution Cameras and Recording Devices and Laser Scanning and Recording Systems, (29 December 1993); doi: 10.1117/12.165203
Show Author Affiliations
Eiichi Tamaki, Dainippon Screen Mfg. Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 1987:
Recording Systems: High-Resolution Cameras and Recording Devices and Laser Scanning and Recording Systems

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