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Proceedings Paper

Precision components for optical fiber connections fabricated by the LIGA process
Author(s): Arnd Rogner
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Paper Abstract

The LIGA process is a new technology for the fabrication of precisely shaped polymer or metal structures. Using x-ray lithography, electroforming and micromolding as basic technologies, an accuracy in the submicron range can be achieved. For applications in fiber to fiber or fiber to chip coupling technology, mechanical structures with an accuracy of down to 0.3 micrometers have been realized and investigated using different techniques and materials. Additionally, passive waveguide components for optical fiber networks have been fabricated by molding techniques in polymer materials. These components show a low insertion loss, a well defined power splitting ratio and a compact device geometry.

Paper Details

Date Published: 18 November 1993
PDF: 9 pages
Proc. SPIE 1973, Passive Fiber Optic Components and Their Reliability, (18 November 1993); doi: 10.1117/12.163763
Show Author Affiliations
Arnd Rogner, MicroParts Gesellschaft fuer Mikrostrukturtechnik GmbH (Germany)


Published in SPIE Proceedings Vol. 1973:
Passive Fiber Optic Components and Their Reliability
Vincent J. Tekippe; John P. Varachi, Editor(s)

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