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Proceedings Paper

Effect of fabrication errors on binary phase grating
Author(s): Zhenwu Lu; Longsheng Qian; Jianghong Liao; Zhicheng Weng
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Paper Abstract

Based on scale diffraction theory, binary phase gratings are designed and the effect of fabrication errors on the diffraction efficiency and uniformity is discussed. The theoretical and numerical analysis shows that (0, non-(pi) ) grating is more sensitive to phase delay error than (0, (pi) ) grating. Patterning error is very complex to analyze, but we can give a maximum intensity deviation to the grating.

Paper Details

Date Published: 25 November 1993
PDF: 5 pages
Proc. SPIE 2000, Current Developments in Optical Design and Optical Engineering III, (25 November 1993); doi: 10.1117/12.163658
Show Author Affiliations
Zhenwu Lu, Changchun Institute of Optics and Fine Mechanics (China)
Longsheng Qian, Changchun Institute of Optics and Fine Mechanics (China)
Jianghong Liao, Changchun Institute of Optics and Fine Mechanics (China)
Zhicheng Weng, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 2000:
Current Developments in Optical Design and Optical Engineering III
Robert E. Fischer; Warren J. Smith, Editor(s)

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