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Proceedings Paper

Wideband monitoring of optical coatings with deposition error correction
Author(s): Peiyun Wu; Peifu Gu; Jinfa Tang
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Paper Abstract

The manufacture of complex multilayers requires the maker to have a satisfactory monitoring system. The monitoring system can control accuracy not only in optical thicknesses of nonquarterwave layers but can also compensate deposition errors in real-time in order to secure a stable monitoring and eventually to achieve the desired optical performance. In this paper, a computer controlled apparatus for monitoring of wideband optical coatings is described. A method, based on performance measurements during the monitoring of a layer in situ, has been developed to determine the actual refractive index and thickness of the layer in vacuo. The method can be used as a means of detecting deposition errors.

Paper Details

Date Published: 25 November 1993
PDF: 12 pages
Proc. SPIE 2000, Current Developments in Optical Design and Optical Engineering III, (25 November 1993); doi: 10.1117/12.163656
Show Author Affiliations
Peiyun Wu, Zhejiang Univ. (China)
Peifu Gu, Zhejiang Univ. (China)
Jinfa Tang, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 2000:
Current Developments in Optical Design and Optical Engineering III
Robert E. Fischer; Warren J. Smith, Editor(s)

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