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Proceedings Paper

Formation of optical disk direction paths and optical master disks with the help of inorganic resists
Author(s): Sergey A. Kostyukevych; Peter E. Shepeljavi; Ivan Z. Indutnyi; Alexander V. Stronski; Apollinary I. Stetsun
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Paper Abstract

In this work, the results of investigations performed on As40S40Se20 and As40S60 layers are presented, peculiarities of optical disks direction paths and optical master disks formation with the help of laser lithography are described.

Paper Details

Date Published: 9 November 1993
PDF: 5 pages
Proc. SPIE 2026, Photonics for Processors, Neural Networks, and Memories, (9 November 1993); doi: 10.1117/12.163608
Show Author Affiliations
Sergey A. Kostyukevych, Institute of Semiconductor Physics (Ukraine)
Peter E. Shepeljavi, Institute of Semiconductor Physics (Ukraine)
Ivan Z. Indutnyi, Institute of Semiconductor Physics (Ukraine)
Alexander V. Stronski, Institute of Semiconductor Physics (Ukraine)
Apollinary I. Stetsun, Institute of Semiconductor Physics (Ukraine)


Published in SPIE Proceedings Vol. 2026:
Photonics for Processors, Neural Networks, and Memories
Stephen T. Kowel; William J. Miceli; Joseph L. Horner; Bahram Javidi; Stephen T. Kowel; William J. Miceli, Editor(s)

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