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Proceedings Paper

Optical and structural properties of composite films prepared by co-evaporation of TiO2 and MgF2
Author(s): Rung-Ywan Tsai; Chaur-Tsang Wei; Fang Chung Ho
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Paper Abstract

The optical and structural properties of TiO2-MgF2 mixed films prepared by coevaporation with ion-assisted deposition have been investigated. The composition of coevaporated TiO2-MgF2 mixed films can be tuned by controlling the relative deposition rates of the two sources. Most of the films with thicknesses less than 500 nm are found to be homogeneous in optical properties. The optical and structural properties of the mixed films change from MgF2-dominant to TiO2-dominant as the TiO2 content in the mixed film increases. The dependence of the refractive index with composition can be fitted by Bottcher's formula at low TiO2 content and by Lorentz-Lorentz formula at high TiO2 content in the mixed films. An application of TiO2-MgF2 mixed films for the design and fabrication of antireflection coatings in the near infrared region has also been discussed.

Paper Details

Date Published: 2 November 1993
PDF: 8 pages
Proc. SPIE 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, (2 November 1993); doi: 10.1117/12.163548
Show Author Affiliations
Rung-Ywan Tsai, Industrial Technology Research Institute (Taiwan)
Chaur-Tsang Wei, Industrial Technology Research Institute (Taiwan)
Fang Chung Ho, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 2046:
Inhomogeneous and Quasi-Inhomogeneous Optical Coatings
Jerzy A. Dobrowolski; Pierre G. Verly, Editor(s)

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