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Proceedings Paper

Program package for the ellipsometry of inhomogeneous layers
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Paper Abstract

In this work we describe ellipsometric software that has been developed at Moscow State University. This software is based on the assurance that hierarchy of models should be used for the thin film. The hierarchy of layer models and the concept of the model being in the agreement with the accuracy of experimental data are discussed.

Paper Details

Date Published: 2 November 1993
PDF: 12 pages
Proc. SPIE 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, (2 November 1993); doi: 10.1117/12.163546
Show Author Affiliations
Alexander V. Tikhonravov, Moscow State Univ. (Russia)
Michael K. Trubetskov, Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 2046:
Inhomogeneous and Quasi-Inhomogeneous Optical Coatings
Jerzy A. Dobrowolski; Pierre G. Verly, Editor(s)

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