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Proceedings Paper

Novel flat-panel display made of amorphous SiN:H/SiC:H thin-film LED
Author(s): Wirote Boonkosum; Dusit Kruangam; Somsak Panyakeow
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Paper Abstract

A novel flat-panel display made of hydrogenated amorphous silicon nitride and silicon carbide Thin Film LED (TFLED) has been developed. The a-SiN:H and a-SiC:H were prepared by a glow discharge plasma CVD technique. The emission colors can be obtained from red, yellow, green to white-blue. The amorphous TFLED can be fabricated as a large area on any foreign substrate. Any emission pattern can be obtained by designing the pattern of the internal thin film electrodes. A series of technical data on the preparation of the a-SiN:H/a-S:C:H TFLED is presented. Some new ideas of the utilizations of the developed TFLED in optoelectronic functional devices are presented and described.

Paper Details

Date Published: 19 November 1993
PDF: 12 pages
Proc. SPIE 1985, Physical Concepts and Materials for Novel Optoelectronic Device Applications II, (19 November 1993); doi: 10.1117/12.162776
Show Author Affiliations
Wirote Boonkosum, Chulalongkorn Univ. (Thailand)
Dusit Kruangam, Chulalongkorn Univ. (Thailand)
Somsak Panyakeow, Chulalongkorn Univ. (Thailand)


Published in SPIE Proceedings Vol. 1985:
Physical Concepts and Materials for Novel Optoelectronic Device Applications II
Fabio Beltram; Erich Gornik, Editor(s)

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