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Proceedings Paper

Step-height standard for surface-profiler calibration
Author(s): Peter Z. Takacs; Michelle X.-O. Li; Karen Furenlid; Eugene L. Church
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Paper Abstract

We report on the design and fabrication of an all-silicon test pattern that is very useful for assessing the performance of all types of profiling instruments. We present examples of results obtained from applying this method to various kinds of profiling instruments, including a WYKO TOPO 3D system, Micromap Promap 512 profilers, a ZYGO Maxim 3D system, and scanning probe AFM systems. We also present the results from a measurement of the BRDF of the step with a TMA CASI scatterometer to show the utility of the step as a potential calibration standard for scattered light measuring instruments.

Paper Details

Date Published: 1 December 1993
PDF: 10 pages
Proc. SPIE 1995, Optical Scattering: Applications, Measurement, and Theory II, (1 December 1993); doi: 10.1117/12.162661
Show Author Affiliations
Peter Z. Takacs, Brookhaven National Lab. (United States)
Michelle X.-O. Li, Brookhaven National Lab. (United States)
Karen Furenlid, Brookhaven National Lab. (United States)
Eugene L. Church, U.S. Army Research, Development & Engineering Ctr. (United States)

Published in SPIE Proceedings Vol. 1995:
Optical Scattering: Applications, Measurement, and Theory II
John C. Stover, Editor(s)

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