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Proceedings Paper

Scattering signatures of isolated surface features
Author(s): Carina Kylner; Joakim P. Ingers; Lars H. Mattsson; Mans Bjuggren
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Paper Abstract

A rigorous one-dimensional integral solution has been utilized to bring up some ideas about possible ways for detecting isolated surface defects by means of angle resolved scattering. Our preliminary results indicate that a suitable combination of polarization and different incidence angles can be useful. Numerical examples are given both for modelled defects and real defects measured with a Talystep profilometer.

Paper Details

Date Published: 1 December 1993
PDF: 8 pages
Proc. SPIE 1995, Optical Scattering: Applications, Measurement, and Theory II, (1 December 1993); doi: 10.1117/12.162657
Show Author Affiliations
Carina Kylner, Royal Institute of Technology (Sweden)
Joakim P. Ingers, Royal Institute of Technology (Sweden)
Lars H. Mattsson, Institute of Optical Research (Sweden)
Mans Bjuggren, Institute of Optical Research (Sweden)

Published in SPIE Proceedings Vol. 1995:
Optical Scattering: Applications, Measurement, and Theory II
John C. Stover, Editor(s)

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